P-517 • P-527 Multi-Axis Piezo Scanner

High dynamics Nanopositioner / Scanner with Direct Position Measuring

2- and 3-axis versions (XY and XYθZ)
Travel ranges to 200 µm
Subnanometer resolution

Fields of application

  • Metrology
  • Interferometry
  • Photonics / integrated optics
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Sample alignment
  • Micromachining

 

Specifications

pdf
pdf

Datasheet P-517 • P-527

2018-02-19
2018-02-19
pdf - 831 KB
pdf - 835 KB

Drawings / Images

P-517.2CL
Precision XY nanopositioning system, 100 µm × 100 µm, capacitive sensors, parallel metrology, LEMO connector(s)
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P-517.2CD
Precision XY nanopositioning system, 100 µm × 100 µm, capacitive sensors, parallel metrology, Sub-D connector
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P-527.2CL
Precision XY nanopositioning system, 200 µm × 200 µm, capacitive sensors, parallel metrology, LEMO connector(s)
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P-527.2CD
Precision XY nanopositioning system, 200 µm × 200 µm, capacitive sensors, parallel metrology, Sub-D connector
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P-517.3CL
Precision XYZ nanopositioning system, 100 µm × 100 µm × 20 µm, capacitive sensors, parallel metrology, LEMO connector(s)
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P-517.3CD
Precision XYZ nanopositioning system, 100 µm × 100 µm × 20 µm, capacitive sensors, parallel metrology, Sub-D connector
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P-527.3CL
Precision XYZ nanopositioning system, 200 µm × 200 µm × 20 µm, capacitive sensors, parallel metrology, LEMO connector(s)
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P-527.3CD
Precision XYZ nanopositioning system, 200 µm × 200 µm × 20 µm, capacitive sensors, parallel metrology, Sub-D connector
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P-517.RCD
Precision XY / rotation nanopositioning system, 100 µm × 100 µm, 2 mrad, capacitive sensors, parallel metrology, Sub-D connector
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P-527.RCD
Precision XY / rotation nanopositioning system, 200 µm × 200 µm, 4 mrad, capacitive sensors, parallel metrology, Sub-D connector
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Downloads

Datasheet

pdf
pdf

Datasheet P-517 • P-527

2018-02-19
2018-02-19
pdf - 831 KB
pdf - 835 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
4.0.0 2017-02-06
pdf - 635 KB
pdf
pdf

User Manual PZ82

P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors
2013-09-05
2013-09-05
pdf - 939 KB
pdf - 938 KB

3-D Models

zip

P-5x7 STEP

English
zip - 221 KB