P-562.6CD PIMars 6-Axis Piezo Stage System

High-precision Nanopositioning System with 6 Degrees of Freedom

6 motion axes: 3 × linear, 3 × rotational
Travel ranges to 200 µm linear and to 1 mrad tip/tilt angle
Parallel kinematics for faster response times and higher multi-axis accuracy
Highest linearity due to capacitive sensors
Zero-play, high-precision flexure guide system
Excellent scanning flatness
Clear aperture 66 mm × 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV-compatible to 10-9 hPa

Specifications

pdf
pdf

Datasheet P-562.6CD

2018-02-19
2018-02-19
pdf - 878 KB
pdf - 884 KB

Drawings / Images

Downloads

Datasheet

pdf
pdf

Datasheet P-562.6CD

2018-02-19
2018-02-19
pdf - 878 KB
pdf - 884 KB

3-D Models

zip

P-562.6CD STEP

English
zip - 809 KB