H-850KHLC Precision Hexapod for High Loads

Vacuum-Compatible, Positioning in 6 Axes with Micrometer Accuracy

Vacuum-compatible to 10-6 hPa
Six degrees of freedom
Load capacity to 1500 kg
Travel ranges to 340 mm / 60°
Min. incremental motion <1 µm
Drive: brushless motors with gearhead
Sophisticated controller using vector algorithms

For positioning high loads in six axes of freedom, special requirements have to be fulfilled by the positioning system. The H-850KHLC Hexapod aligns elements in vacuum environments with highest precision, the mechanical coupling is adapted to the vacuum chamber's characteristics.


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