LMS-180 Precision Linear Stage

High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy

PI LMS-180
Travel ranges to 508 mm (20")
Velocity to 500 mm/s
Incremental encoder with 15 nm resolution

Reference-class linear stage

High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).

Multi-axis combinations with the directly driven rotation stages of the UPR series.

Versions with DC servo or stepper motors are available with the same footprint.

 

Magnetic direct drive

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Fields of application

Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.

Specifications

pdf
pdf
pdf

Datasheet LMS-180

2017-04-19
2017-04-19
2017-08-08
pdf - 656 KB
pdf - 660 KB
pdf - 737 KB

Drawings / Images

Direction of the axes and moments for linear stages
LMS-180 Drawing

Downloads

Datasheet

pdf
pdf
pdf

Datasheet LMS-180

2017-04-19
2017-04-19
2017-08-08
pdf - 656 KB
pdf - 660 KB
pdf - 737 KB

Documentation

pdf
pdf

User Manual LMS-180

Precision Linear Stage
MAN_LMS-180_9_EN_01.PDF
2017-04-21
pdf - 925 KB
pdf - 930 KB

3-D Models

zip

LMS-180 STEP

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zip - 11 MB