A-121 PIglide AT1 Linear Stage with Air Bearings

High Performance Small Footprint Nanopositioning Stage

Physik Instrumente (PI) A-121 PIglide AT1 Linear Stage with Air Bearings
Ideal for scanning applications or high-precision positioning
Cleanroom compatible
Size of the motion platform 115 mm × 115 mm
Travel ranges to 350 mm
Low profile from 60 mm
Resolution to 1 nm

Product Overview

The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

A high-force linear motor can drive the stage to top speed within a few milliseconds. The preloaded air bearing construction supports mounting in any orientation.

Accessories and options

 

  • Encoder
  • PIglide filter and air preparation kits
  • Multi-axis motion controller and direct drives
  • XY setups and individual configurations
  • Cable track variations
  • Counterbalance options for vertical assembly
  • Base plates made of granite and systems for reducing vibration

 

 

Application fields

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

pdf
pdf
pdf

Datasheet A-121

2017-08-09
2017-08-09
2017-10-24
pdf - 976 KB
pdf - 984 KB
pdf - 1 MB

Drawings / Images

PI A-121 Drawing

Travel range 50 mm

A-121.050A1
PIglide AT1 Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
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A-121.050B1
PIglide AT1 Linear Stage, Air Bearing, 50 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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A-121.050C1
PIglide AT1 Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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Travel range 100 mm

A-121.100A1
PIglide AT1 Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
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A-121.100B1
PIglide AT1 Linear Stage, Air Bearing, 100 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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A-121.100C1
PIglide AT1 Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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Travel range 150 mm

A-121.150A1
PIglide AT1 Linear Stage, Air Bearing, 150 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
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A-121.150B1
PIglide AT1 Linear Stage, Air Bearing, 150 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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A-121.150C1
PIglide AT1 Linear Stage, Air Bearing, 150 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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Travel range 200 mm

A-121.200A1
PIglide AT1 Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
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A-121.200B1
PIglide AT1 Linear Stage, Air Bearing, 200 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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In cart Remove from cart
A-121.200C1
PIglide AT1 Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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Travel range 250 mm

A-121.250A1
PIglide AT1 Linear Stage, Air Bearing, 250 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
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A-121.250B1
PIglide AT1 Linear Stage, Air Bearing, 250 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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In cart Remove from cart
A-121.250C1
PIglide AT1 Linear Stage, Air Bearing, 250 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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Travel range 350 mm

A-121.350A1
PIglide AT1 Linear Stage, Air Bearing, 350 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
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A-121.350B1
PIglide AT1 Linear Stage, Air Bearing, 350 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
Add to cart Add to cart
In cart Remove from cart
A-121.250C1
PIglide AT1 Linear Stage, Air Bearing, 250 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V
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Alternate TTL encoder resolutions are available on request.

Downloads

Datasheet

pdf
pdf
pdf

Datasheet A-121

2017-08-09
2017-08-09
2017-10-24
pdf - 976 KB
pdf - 984 KB
pdf - 1 MB

Documentation

pdf

User Manual A121D0001

A-121 PIglide AT1 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback
2016-12-02
English
pdf - 1 MB

3-D Models

zip

A-121 3-D model

English
zip - 10 MB