PiezoWalk® Actuators with High Force & Stability

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PI is a worldwide leading supplier of solutions in the fields of motion and positioning. PI does not only develop and produce a broad range of positioning stages and actuators for linear, rotary and vertical motion or combinations of different axes. PI also adapts those solutions to customer-specific applications or supplies finished subsystems for motion and positioning.
- Product Finder
  
  Product Finder
  
  Select the product type specified by the axes of motion required. Selection of more criteria expands or shortens the list of results. Select more than one filter at a time, for example, to find positioning stages designed for higher load capacity, too.
- Nanopositioning Piezo Flexure Stages
  
  Nanopositioning Piezo Flexure Stages
  
  Multi-Axis Piezo Flexure Stages
  
  Multi-Axis Piezo Flexure Stages
  
  PIFOC® Objective & PInano® Sample Scanners for Microscopy
  
  PIFOC® Objective & PInano® Sample Scanners for Microscopy
  
  Linear Piezo Flexure Stages
  
  Linear Piezo Flexure Stages
  
  XY Piezo Flexure Stages
  
  XY Piezo Flexure Stages
  
  Piezo Flexure Tilting Mirrors
  
  Piezo Flexure Tilting Mirrors
- Miniature Stages
  
  Miniature Stages
  
  Miniature Linear Stages
  
  Miniature Linear Stages
  
  Miniature Rotation Stages
  
  Miniature Rotation Stages
  
  Miniature Hexapods
  
  Miniature Hexapods
- Linear Stages
  
  Linear Stages
  
  Stages with PIMag® Magnetic Direct-Drive Linear Motor
  
  Stages with PIMag® Magnetic Direct-Drive Linear Motor
  
  Stages with Stepper, DC & Brushless DC (BLDC) Motors
  
  Stages with Stepper, DC & Brushless DC (BLDC) Motors
  
  Vertical Stages with Stepper, DC & Brushless DC (BLDC) Motors
  
  Vertical Stages with Stepper, DC & Brushless DC (BLDC) Motors
  
  Miniature Linear Stages
  
  Miniature Linear Stages
- Linear Actuators
  
  Linear Actuators
  
  PiezoMike for Long-Term Stability
  
  PiezoMike for Long-Term Stability
  
  Linear Actuators with Stepper & DC Servo Motors
  
  Linear Actuators with Stepper & DC Servo Motors
  
  PIMag® VC Voice Coil Actuators with High Dynamics & Force Control Option
  
  PIMag® VC Voice Coil Actuators with High Dynamics & Force Control Option
  
  PiezoMove Lever Actuators
  
  PiezoMove Lever Actuators
  
  Nanopositioning Piezo Actuators
  
  Nanopositioning Piezo Actuators
  
  PiezoWalk® Actuators with High Force & Stability
  
  PiezoWalk® Actuators with High Force & Stability
- Rotation Stages
  
  Rotation Stages
  
  Requirements for rotary motion show a very broad range of different sizes, load capacity, and positioning accuracy. PI offers stages with all kinds of motorization and guiding options: air-bearing, torque motor driven, motorized worm-gear coupled, tiny piezomotor stages and specialized goniometer stages with orthogonal tip-tilt mounting option.
- XY Stages
  
  XY Stages
  
  Stability, precision and dynamics are crucial in the application fields of PI’s XY stages. They are the basis of high throughput rates and reliable operation. PI makes use of own developments in the fields of PIMag® magnetic linear motors and PIglide air bearings. Industrial production and quality control benefit from PI’s high-load XY stages and planar scanners.
- Hexapods
  
  Hexapods
  
  Hexapods provide 6 degrees of freedom in the most compact package. In combination with absolute measuring sensors, software and motion controllers that make the most complicated motion profiles easy to command, PI hexapods answer industrial requirements.
- Engineered Systems
  
  Engineered Systems
  
  Precision components, stable control and a great deal of experience in engineering are essential for high-precision complex motion and positioning solutions. PI is a supplier of technologically sophisticated drive components and high-precision positioners and also offers all levels of integration up to the turnkey solution.
- Fast Multi-Channel Photonics Alignment
  
  Fast Multi-Channel Photonics Alignment Systems
  
  Piezo scanners take care of fast, continuous scanning tasks, where durability, dynamics, and precision matter. The larger travel ranges are realized with XYZ combinations or 6-axis hexapods. The high-performance controllers control all axes using firmware-based routines for simultaneous optimization of several inputs and outputs. Integrated routines make it possible to perform single-axis alignments up to complex, multi-axis fiber array positioning within the shortest possible time.
- Piezoelectric Transducers & Actuators
  
  Piezoelectric Transducers & Actuators
  
  Piezoelectric ultrasonic transducers are available in a wide range of shapes like disks, plates or tubes, and different performance levels. They can be adapted to application requirements by using different piezoceramic materials, electrodes, and assembling technology. They are present wherever ultrasound is needed, like in flow metering, structural monitoring, and many medical applications.
- Air Bearings & Stages
  
  Air Bearings & Stages
  
  Air bearing stages are used where vibration-free motion is required, velocity needs to be highly constant, and optimum angular repeatability is requested.
- Controllers & Drivers
  
  Controllers & Drivers
  
  Nanopositioning Piezo Controllers
  
  Nanopositioning Piezo Controllers
  
  Piezo Drivers for Open-Loop Operation of Piezo Actuators
  
  Piezo Drivers for Open-Loop Operation of Piezo Actuators
  
  Motion Controllers & Drivers for Linear, Torque, Stepper & DC Servo Motors
  
  Motion Controllers & Drivers for Linear, Torque, Stepper & DC Servo Motors
  
  Controllers & Drivers for Piezomotors
  
  Controllers & Drivers for Piezomotors
  
  Controller Systems for Multiple Axes & Mixed Drive Types
  
  Controller Systems for Multiple Axes & Mixed Drive Types
  
  Hexapod Motion Controllers
  
  Hexapod Motion Controllers
  
  ACS Motion Control
  
  ACS Motion Control for Industrial Applications
  
  We recommend the controllers of our partner, ACS Motion Control especially for automation with industrial standards. Ask us about your integrated solution!
- Sensors, Components & Accessories
  
  Sensors, Components & Accessories
Applications
Applications & Markets

PI positioning systems are employed where technology is pushed forward in industry and research. This is done, for example, in semiconductor manufacturing, in medical engineering, in biotechnology, in plant engineering, in surface metrology, or in astronomy.
- Hexapods Support Industrial Robots
  
  Hexapods Support Industrial Robots
  
  Because the need for multi-axis and also precision robots in production and quality processes is on the increase, industry is looking out for new types of robotics. PI offers parallel-kinematic hexapods for these tasks.
- Scientific Instrumentation
  
  Scientific Instrumentation
  
  The term "scientific instrumentation" covers a variety of different applications, starting with microscopy via beamline processes through to the wide field of laboratory automation.
  
  Hexapod Systems for ALMA
  
  Hexapod Systems for ALMA
  
  Under the extreme conditions of the Atacama Desert, PI hexapods align the subreflectors to the large main reflectors of the ALMA radio telescopes.
  
  Double-Crystal Monochromator
  
  Double-Crystal Monochromator for an X-Ray Spectrometer
  
  The PI Beamline Instrumentation division’s aim is to develop application oriented solutions, e.g., this monochromator for an X-ray spectrometer.
  
  Materials Research in High Vacuum
  
  Materials Research in High Vacuum
  
  PI provides standard and custom high vacuum compatible positioning systems for materials research with high-energy X-rays.
  
  Active Vibration Isolation with Piezo Actuators
  
  Active Vibration Isolation with Piezo Actuators
  
  Active vibration isolation reduces settling times, increases precision in measurement and production sequences and achieves high throughput rates.
- Semiconductor Technology
  
  Semiconductor Technology
  
  Lithographic processes are the reason why chips are getting smaller and smaller and why extremely fine structures can be realized on silicon wafers. Piezo drives have made these technical advances possible with their performance and reliability.
- Microscopy
  
  Microscopy
  
  Imaging processes increase efficiency across a number of fields, ranging from medical engineering to pharmaceutical research and manufacturing of semiconductors.
  
  Atomic Force Microscopy
  
  AFM Scanner for Atomic Force Microscopy
  
  Specimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
  
  High-Speed Microscopy
  
  High-Speed Microscopy for Quality Control
  
  Specimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
  
  White light interferometry
  
  3-D Surface Inspection With Piezo-Based Positioning Systems from PI
  
  High-resolution camera systems are combined with white light interferometry for 3-D surface inspection with picometer resolution.
  
  Lens Positioning for 3-D Surface Inspection
- Silicon Photonics
  
  Silicon Photonics
  
  Silicon photonics allows data rates into theTbit/s range and is therefore suitable for computer-aided services that require the highest possible transmission speeds.
  
  Photonics Packaging
  
  Automated Photonics Packaging
  
  An automated assembly and alignment system can reduce the manufacturing process for silicon photonics to only a few minutes. However, handling the delicate waveguides is indeed a major challenge as the integration of the light sources at a wafer level and connection of the optical inputs and outputs are difficult to perform.
  
  Optical Fiber Alignment
  
  Simultaneous Testing of Optical Components in Silicon Photonics
  
  Silicon photonics presents new challenges for the production of components as well as testing and slicing the wafers.
- Medical Technology
  
  Medical Technology
  
  Progress in pharmaceutical research, diagnostics, and therapy requires high-performance and precise position systems. In addition to high positioning precision, requirements for the drives often include compact dimensions, low energy consumption, speed, and high reliability.
  
  Endoscopy
  
  Chip-on-the-Tip Video Endoscopes with Miniature Drives
  
  Piezomotors and magnetic miniature drives offer the option of better focus and zoom functions in chip-on-the-tip video endoscopes.
  
  Ophthalmology
  
  High-Precision Drives in Ophthalmic Surgery
  
  The control and focusing of laser beams in ophthalmic surgery requires accurate positioning systems, such as piezo-driven tip/tilt mirror systems.
  
  Magnetic Resonance Imaging
  
  Nonsensitive Drives for Magnetic Resonance Therapy
  
  Piezo drives are well suited for magnetic resonance therapy, because they are not influenced by strong magnetic fields.
  
  Optical Coherence Tomography
  
  Piezo Technology and Optical Coherence Tomography (OCT)
  
  Piezo actuators and drives, e.g., PILine® OEM motors, ensure the high precision and position stability required for optical coherence tomography (OCT).
  
  Pipetting
  
  Piezomotors for Pipetting and Nanodispensing
  
  Piezomotors are suited for pipetting with small devices and sample separations and are able to move the pipettes in the vertical direction.
  
  Precision Dosing
  
  Dynamic Drives for Precision Dosing with Nanodispensers
  
  Piezo actuators are ideal for precision dosing with nanodispensers: They can switch valves directly, and can also work against a closing spring.
  
  Micropumps
  
  Piezoelectric Micropumps – Compact Design and High Performance
  
  Piezoelectric micro-diaphragm pumps offer high performance on small space – the drives allow a continuous flow and a variable flow rate.
  
  Image Stabilization
  
  Image Stabilization and Microscanning with Piezo Scanners
  
  Fast, piezo-based scanners operate with the necessary velocities in the video frequency range for image stabilization and microscanning.
  
  Confocal Microscopy
  
  Adjustment of the Focal Planes in Confocal Microscopy
  
  Confocal microscopy is used to detect the structure of the sample surface through the shifting of the focal plane, for example in dermatology.
  
  Adaptive Diaphragm Positioning
  
  Adaptive Diaphragm Positioning
  
  In radiation therapy, the individual leaves are adjusted so that the healthy tissue offers the optimum protection from the radiation.
- Materials Research
  
  Materials Research
  
  Efficiency has become an important buzzword these days. Materials research has paid a major contribution as the results have, for example, optimized processing methods. Methods such as X-rays and lasers or white light interferometry demand precise positioning of the specimens to be examined and of optics or beam control.
  
  Parallel Kinematics for Materials Research
  
  High-Load Parallel Kinematics for Materials Research
  
  The high-energy X-rays at beamlines provide numerous possibilities for materials research, such as checking welding seams of workpieces.
  
  Laser Beam Control
  
  Piezo Drives for Laser Beam Control
  
  Lasers are tools that can be used in many areas of application. At the same time, the laser beam control requires precision, dynamics, and reliability.
- Mechanical Engineering
  
  Mechanical Engineering
  
  Mechanical engineering and manufacturing technology require fast, reliable and energy-saving drive components. The spectrum ranges from piezo actuators to six-axis parallel kinematics which can communicate directly with CNC controls.
  
  Electrical Discharge Machining
  
  Piezo Actuators Accelerate Electrical Discharge Machining
  
  Precision components are manufactured using electrical discharge machining, often in large numbers. Vibrating piezo actuators make a crucial contribution here.
  
  Hexapods in Mechanical Engineering
  
  Hexapods in Mechanical Engineering
  
  PI hexapod 6-axis positioning systems can handle loads from 2 kg to several tons. Ideal for precision mechanical engineering applications.
- Automation
  
  Automation
  
  Piezo drives, magnetic direct drives, and hexapods are part and parcel of automation today. They operate precisely and reliably and have proven themselves under rugged conditions.
  
  Smarter Motion Positioning
  
  Smarter Motion Positioning
  
  Positioning and motion tasks in industrial automation such as those in assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive manufacturing demand solutions that need to be robust and reliable.
  
  Hexapods in Microproduction
  
  Hexapods in Microproduction
  
  What do optical components and glass fibers in photonics, mobile devices, and high-quality wristwatches all have in common?
  
  Hexapods for Quality Assurance
  
  Hexapods for Quality Assurance
  
  Microproduction technology makes high-precision positioning systems absolutely necessary for both assembly and quality assurance.
  
  Magnetic Direct Drives
  
  Magnetic Direct Drives
  
  Magnetic direct drives, which include voice-coil actuators and linear drives, are often predestined here as the best solutions for many reasons.
  
  Motion Simulation with Hexapods
  
  Motion Simulation with Hexapods
  
  Motion simulation with hexapods with CIPA certificate from PI (Physik Instrumente) – vibrating tables are used for testing resistance to vibration.
  
  Flexibility in Dimensional Measuring
  
  Hexapod Systems in Automation
  
  Hexapods allow for an outstanding flexibility for a variety of samples of in-line automation systems by minimizing the space for motion robotics.
  
  Motion Compensation with Hexapods
  
  Motion Compensation with Hexapods
  
  Dynamic hexapods with piezo drives: Best conditions for motion compensation.
  
  Fast Piezo Ultrasonic Drives Advance Technology
  
  Fast Piezo Ultrasonic Drives Advance Technology
  
  When increased demands are placed on an application, ultrasonic piezo motors can prove to be a good alternative, as they can be used in many ways.
- Beamline Instrumentation
  
  Beamline Instrumentation
  
  Scientific experiments pose their own challenges, and beamline X-ray experiments are even more special in themselves. However, the need for precision equipment is universal.
  
  Tomography Equipment
  
  Tomography Equipment
  
  Synchrotron Spectroscopy in Vacuum
  
  Synchrotron Spectroscopy in Vacuum
  
  Beam Preparation
  
  Beam Preparation
  
  Sample Positioning for Tomography
  
  Sample Positioning for Tomography
  
  Microscopy
  
  Microscopy
  
  Accelerator Technology
  
  Accelerator Technology
  
  Dynamic compensation of Lorentz forces at the XFEL accelerator structures: The particle accelerator XFEL at the DESY (German Electron Synchrotron) uses acceleration technology based on super-conducting acceleration structures, so-called resonators or cavities.
Technology
Know-How & Technology

PI combines its long-term experience in micro and nanopositioning technology with in-depth knowledge in the fields of mechanics, electronics, sensor engineering, and software. Thus, PI is able to offer its customers the most advanced drive technologies and system solutions.
- Piezo Technology
  
  Piezo Technology
  
  PI Ceramic offers a wealth of experience in the manufacturing of piezoceramic materials, components, and actuators. The piezoceramic materials can be adapted individually to perfectly fit the later use of the piezo components.
  
  Fundamentals of Piezo Technology
  
  Fundamentals of Piezo Technology
  
  Physical basics and explanations of piezo electricity and electromechanics.
  
  Properties of Piezo Actuators
  
  Properties of Piezo Actuators
  
  Characteristics of piezoceramic actuators: Displacement modes, forces and stiffnesses, dynamics. Ambient conditions.
  
  Piezoceramic Materials
  
  Piezoceramic Materials
  
  PI Ceramic offers a variety of different piezoelectric materials including lead-free materials.
  
  Manufacturing Technology
  
  Manufacturing Technology
  
  PI Ceramic offers a wide range of manufacturing technologies: Pressing or tape technology, assembling technology and testing procedures.
  
  PICMA® Technology
  
  PICMA® Technology
  
  Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
  
  Integrated Piezo Actuators
  
  Integrated Piezo Actuators
  
  To avoid pull forces, these piezo elements are provided with a mechanical preload in mechanical cases or by means of flexure joints.
- Piezoelectric Drives
  
  Piezoelectric Drives
  
  Depending on the configuration and control, piezoceramic actuators can be used to create translational motions or as motors with a virtually unlimited travel range. The choice of drive depends on the requirements of the application.
  
  Piezo Actuators
  
  Piezo Actuators with and without Guiding
  
  Piezoelectric actuators offer subnanometer resolution and very short response times, making them ideally suitable for nanometer-precision positioning at high dynamics.
  
  PiezoWalk® Walking Drives
  
  PiezoWalk® Walking Drives
  
  PiezoWalk® drives were developed more than 10 years ago for the semiconductor industry, a demanding industry when it comes to reliability, position resolution and long-term stability.
  
  PILine® Ultrasonic Piezomotors
  
  PILine® Ultrasonic Piezomotors
  
  Ultrasonic piezomotors dispense with the mechanical complexity of classical rotary motor/gear/leadscrew combinations in favor of costs and reliability.
  
  Piezo Inertia Drives
  
  Piezo Inertia Drives
  
  Inertia Drives are space-saving and low-cost piezo-based drives with relatively high holding forces and a travel range that is only limited by the length of the runner.
  
  PiezoMike Linear Actuators
  
  PiezoMike Linear Actuators
  
  Compact, low-cost inertia drive principle (stick-slip). When at rest, the drive is self-locking, requires no current and generates no heat. It holds the position with maximum force.
  
  Comparison: Piezo Motors & Drive Technologies
  
  Comparison: Piezo Motors & Drive Technologies
  
  PIs drive technologies in comparison: Piezo motors, stepping drives, ultrasonic drives, and piezo inertia drives.
- Electromagnetic Drives
  
  Electromagnetic Drives
  
  Rotating electric motors such as DC or stepper motors are used in connection with screw or worm drives. Stepper motor systems with high-resolution encoders can perform minimum incremental motions of 10 nm with high reliability and repeatability.
  
  Rotating Electric Motors
  
  Rotating Electric Motors from PI
  
  Rotating electric motors such as DC or stepper motors are used in connection with screw or worm drives.
  
  PIMag® Magnetic Direct Drives
  
  PIMag® Magnetic Direct Drives
  
  In particular in terms of wear and dynamics, magnetic direct drives offer advantages compared to common spindle-based technologies.
  
  PIMag® 6-D Magnetic Levitation
  
  PIMag® 6-D Magnetic Levitation at Six Levels of Freedom
  
  PIMag® 6-D is an electromagnetic positioning system in which the passive platform levitates on a magnetic field and is actively guided by it.
  
  Hybrid Concept
  
  Piezo & Motor Hybrid Concept
  
  In the hybrid concept, the DC servo motor (large travel ranges) and the piezo drive (nanometer accuracy) are combined with one another.
- Parallel Kinematics
  
  Parallel Kinematics
  
  In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform. This means that all axes can be designed with identical dynamic properties, thus reducing the moved mass considerably. Hexapods are used for moving and precision positioning, aligning and displacing loads in all six degrees of freedom, i.e., three linear and three rotational axes.
  
  Parallel Kinematics
  
  Piezo Positioning Systems with Parallel Kinematics
  
  In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.
  
  Multi-Axis Positioners
  
  Multi-Axis Positioners and Stewart Platforms
  
  Hexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes, and three rotational axes.
  
  Hexapod as Motion Simulator
  
  Hexapod as Motion Simulator
  
  Motion simulators have higher motion dynamics requirements (shakers).
  
  Software for Hexapods
  
  Hexapod 6-Axis Motion Controller and Software
  
  Due to their parallel kinematic structure, hexapods necessitate a particularly complex control system.
- Sensor Technologies
  
  Sensor Technologies
  
  The linearity and repeatability achieved are not possible without highest-resolution measuring devices. Accuracies in the range of a few nanometers and below require a position measurement method that can also detect motion in this range.
  
  Capacitive Sensors
  
  Capacitance Nanosensors
  
  Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.
  
  Incremental Sensors
  
  Linear Scale Encoders for Nanometrology & Nanopositioning
  
  PI uses incremental measurement systems for longer travel ranges, starting from approximately one millimeter. These sensors, which in most cases are optical sensors, achieve position resolution down to the picometer range.
  
  PIOne Optical Nanometrology Encoder
  
  PIOne Optical Nanometrology Encoder
  
  The PIOne high-resolution linear sensor developed by PI ensures a position resolution of far less than one nanometer with adequate measurement analysis.
  
  Comparison: Position Sensor Technologies
  
  Comparison: Nanopositioning Sensor Technologies
  
  Positioning systems that need to provide accuracies in the range of a few nanometers and below require a position measurement technique that can also detect motion in this range.
- Controllers & Software
  
  Controllers & Software
  
  Fast settling or extremely smooth low speed motion, high positional stability, high resolution and high dynamics – the requirements placed on piezo systems vary greatly and need drivers and controllers with a high degree of flexibility.
  
  Digital & Analog Interfaces
  
  Digital & Analog Interfaces
  
  Fast USB or TCP/IP interfaces as well as RS-232 are the standard interfaces supported by modern digital controllers from PI. Furthermore, PI also provides digital or analog real-time capable interfaces.
  
  Control of Piezo Actuators
  
  Piezo Controllers & Drivers for Nanopositioning Systems
  
  Characteristic properties of piezo actuators include high feed forces and fast response. Since piezoelectric actuators react to even the smallest change in voltage with a motion, noise or drift in the control must be avoided.
  
  Digital Motion Controllers
  
  Digital Motion Controllers
  
  Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.
  
  Software
  
  Motion Control Software from PI
  
  All positioning systems from Physik Instrumente (PI) and piezo and motion controllers and drivers are supported by a solid software package.
- Guiding Systems & Force Transmission
  
  Guiding Systems & Force Transmission
  
  Flexure joints, mechanical guide components or magnetic bearings? Which kind of guiding system PI uses in its products depends on parameters such as travel range, required precision, load, lifetime, and ambient conditions.
  
  Classical Guiding Systems
  
  Comparison: Classical Guiding Systems and Force Transmission
  
  Positioners with travel ranges from several millimeters to one meter usually utilize traditional mechanical guide components such as ball bearings.
  
  Flexure Guiding Systems
  
  Flexure Guiding Systems for Nanopositioning & Piezo Actuators
  
  Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
  
  Magnetic Bearings
  
  Magnetic Levitation & Precision Bearings for Nanopositioning
  
  Magnetic levitation allows excellent guiding accuracy in a plane, both linear and rotational.
  
  PIglide Air Bearing Technology
  
  PIglide Air Bearing Technology
  
  Multi-axis motion with nanometer precision and without friction.
- Vacuum
  
  Vacuum Compatible Linear & Rotary Stages, UHV Positioners
  
  Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
- Metrology
  
  Metrology
  
  PI qualifies its products with external measuring equipment. These are calibrated in part and traceable to a national standard. Using the PIOne incremental encoder and capacitive sensors, PI manufactures own metrology for inclusion in PI products.
- Heavy Load Hall
  
  Heavy Duty Hall for Positioning Systems Weighing Several Tons
  
  The product range from a two-ton hexapod to a ten-gram nanopositioner requires that PI can both manufacture and qualify these systems. For this reason, PI operates a heavy duty hall at its location in Karlsruhe for the assembly and measurement of masses up to five tons.
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PiezoWalk® actuators are highly specialized piezobased drives intended for integration. Designed for use in the semiconductor industry, they unite best reliability, position resolution and long-term stability.

Their special features include minimum size with high force generation. The drive itself is resistant to magnetic fields. Contact PI for your modification!